极紫外光栅结构
Eulitha公司新推出极紫外光栅系列产品。采用高分辨电子束曝光工艺可制作周期达80nm的各种光栅结构,产品可有效提高衍射效率及传输效率。Eulitha可根据用户的需求提供产品定制服务。具体产品信息如下:

脉冲压缩透射光栅
脉冲压缩透射光栅的优势在于衍射效率高和波前变形低,面向光栅的多种使用要求。优化的线性P-偏振衍射效率在95%以上,它可以将光学系统损耗降到很小,特别是应用于高能激光器的光学系统。
优点:
- 对特定的偏振具有优异的衍射效率
- 针对宽带和低角度敏感性的特殊设计
- 采用超抛光石英衬底使波前变形最小化
- 使用熔融石英和高可靠介电材料
- 不含聚合物或有机材料
- 每个光栅均为超低散射光栅母板
- 超精密线密度(线密度均匀性<0.001线/mm)
应用:
- 皮秒和飞秒脉冲压缩
- 高功率激光器
- 频谱合成和光束控制
- 远程光学传感器和光谱
说明:
光栅可在较大的光谱范围和角度范围内高效率地工作。操作波长超过25毫米的情况下,波前误差<0.2λ。
Item | Optimal Wavelength Range1 (nm) | Line Density (Lines/mm) | Angle of Incidence1(°) | Operational Polarization2 | Diffraction Efficiency3(%) |
1 | 800±20 | 1398.6 | 34.0±1 | S and P | >94 |
2 | 800±20 | 1851.85 | 47.8±1 | S | > 94 |
3 | 850±20 | 1208.46 | 30.7±1 | S | > 94 |
4 | 875±20 | 1503.76 | 41.0±1 | S and P | > 94 |
5 | 895±20 | 1702.13 | 49.5±1 | S and P | > 92 |
6 | 915±10 | 1851.85 | 57.9±1 | S | > 93 |
7 | 930±20 | 1500.38 | 44.2±1 | S and P | > 94 |
8 | 970±10 | 1600 | 51.3±1 | S | > 94 |
9 | 970±10 | 1851.85 | 63.9±1 | S | > 93 |
10 | 1030±10 | 1600 | 55.5±1 | S | > 94 |
11 | 1030±10 | 1702.13 | 61.2 ±1 | S | > 93 |
12 | 1030±10 | 1739.13 | 63.6±1 | S | > 90 |
13 | 1040±20 | 1000 | 31.3±1 | S and P | > 94 |
14 | 1060+20 | 1600 | 58.0±1 | S | > 94 |
Notes: | 1. Gratings will be highly efficient over larger range of angles – please inquire. 2. P-polarization: incident electric field vector perpendicular to grating lines. S-polarization: incident electric field vector parallel to grating lines. 3. For gratings supporting both S and P polarizations, the diffraction efficiency is the average efficiencies of S and P polarization at any given wavelength
|
Mechanical:
Description | Value |
Substrate Width and Height Tolerance | standard tolerance ± 0.2 mm |
Grating Area Clear Aperture (CA) | 0.5 mm from substrate edge; exception: 125 mm for 130 mm wide gratings |
Substrate Thickness | 0.675 ±0.050 or 0.95 ±0.050 (up to 10 mm custom thickness available) |
Surface Quality in CA | 60/40 scratch/dig |
Surface Quality outside of CA | no requirements |
Material | Fused silica substrate, non-organic dielectrics. Contains no polymers. |
Notes: Better tolerances and surface quality available for custom products |
透射光栅:专用于光通信技术
透射光栅将分散的多角度的入射光转变成光谱。
我们的透射光栅采用先进的设计和精密的光刻晶圆制造,具有优质的衍射效率,超低偏振损耗,提供低成本、高品质的光学性能,为您的光学系统提供强大的竞争优势。
优点:
- 优质的衍射效率
- 超低偏振损耗
- 特殊设计的宽带和小角度的敏感性
- 使用熔融石英和高可靠介电材料
- 无聚合物或有机物;Telcordia质量标准
- 每个光栅均为超低散射母光栅
- 超高性价比
应用:
- 光通信(ROADM,WSS,WDM MUX/ DEMUX)
- 皮秒和飞秒脉冲压缩
- 高功率激光器
- 光谱光束组合
- 远程光学传感器和光谱
以下规格标准光栅有现货。可以根据线密度、光谱波段、输入/输出光束的几何形状和衬底尺寸等提供定制服务。
Polarization-Independent Telecom Transmission Gratings
Item | Wavelength Range (nm) | Line Density (Lines/ mm) | Angle of Incidence1(°) | Diffraction Efficiency2(%) | Insertion Loss Ripple (dB) | Polarization- Dependent Loss2 (dB) | Wavefront Error (@1545 nm λ) | Substrate thickness (mm) |
1 | 1525-1565 | 966.18 | 48.3+1 | > 94 | < 0.1 | < 0.2 | < 0.1 | 0.675+0.05 |
2 | 1525-1565 | 940.07 | 46.5+1 | > 94 | < 0.1 | < 0.2 | < 0.1 | 0.675+0.05 |
3 | 1570-1610 | 940.07 | 48.4+1 | > 94 | < 0.1 | < 0.2 | < 0.1 | 0.675+0.05 |
4 | 1526-1610 | 940.07 | 47.5+1 | > 92 | < 0.1 | < 0.2 | < 0.1 | 0.675+0.05 |
High Dispersion Single Polarization Telecom Transmission Gratings
Item | Wavelength Range (nm) | Line Density (Lines/ mm) | Angle of Incidence1(°) | Diffraction Efficiency2(%) | Insertion Loss Ripple (dB) | Operational Polarization | Wavefront Error (@1545 nm λ) | Substrate thickness (mm) |
1 | 1529-1568 | 1201.2 | 68+0.5 | > 90 | < 0.03 | S | < 0.1 | 5.6+0.2 |
2 | 1572-1612 | 1166.18 | 68+0.5 | > 90 | < 0.04 | S | < 0.1 | 5.6+0.2 |
Polarization Independent Datacom Transmission Gratings
Item | Wavelength Range (nm) | Line Density (Lines/ mm) | Angle of Incidence1(°) | Diffraction Efficiency2(%) | Polarization-Dependent Loss (dB) | Wavefront Error (@650 nm λ) |
1 | 850-940 | 1702.13 | 49.5±1 | ≥ 90 | < 0.3 | < 0.25 |
2 | 1275-1345 | 1201.2 | 52.0±1 | ≥ 85 | < 0.3 | < 0.25 |
Notes: | 1. Gratings will be highly efficient over larger range of angles – please inquire. 2. Determined from parabolic fit of efficiency as a function of wavelength for s- and p- polarization, worst case in the wavelength range. |